JPS542543B2 - - Google Patents
Info
- Publication number
- JPS542543B2 JPS542543B2 JP12541475A JP12541475A JPS542543B2 JP S542543 B2 JPS542543 B2 JP S542543B2 JP 12541475 A JP12541475 A JP 12541475A JP 12541475 A JP12541475 A JP 12541475A JP S542543 B2 JPS542543 B2 JP S542543B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12541475A JPS5249770A (en) | 1975-10-20 | 1975-10-20 | Pattern inspection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12541475A JPS5249770A (en) | 1975-10-20 | 1975-10-20 | Pattern inspection device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5249770A JPS5249770A (en) | 1977-04-21 |
| JPS542543B2 true JPS542543B2 (en]) | 1979-02-08 |
Family
ID=14909505
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12541475A Granted JPS5249770A (en) | 1975-10-20 | 1975-10-20 | Pattern inspection device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5249770A (en]) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54113262A (en) * | 1978-02-24 | 1979-09-04 | Hitachi Ltd | Mask inspection unit |
| JPS6177334A (ja) * | 1984-09-21 | 1986-04-19 | Fujitsu Ltd | 電子ビ−ム装置 |
| JPH09273908A (ja) * | 1996-04-05 | 1997-10-21 | Komatsu Ltd | 光学的計測装置 |
| NL1029982C2 (nl) * | 2005-09-19 | 2007-03-20 | Fei Co | Werkwijze voor het instellen van de werkingssfeer van een toestelcomponent op een vooraf vastgesteld element. |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49135581A (en]) * | 1973-04-28 | 1974-12-27 | ||
| JPS5093772A (en]) * | 1973-12-21 | 1975-07-26 | ||
| JPS5143958A (en) * | 1974-10-12 | 1976-04-15 | Nippon Jido Seigyo Kk | Pataanno ketsukankensahoho |
-
1975
- 1975-10-20 JP JP12541475A patent/JPS5249770A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5249770A (en) | 1977-04-21 |